Scanning Electron Microscopy: Physics of Image Formation and Microanalysis (Hardcover)

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Scanning Electron Microscopy: Physics of Image Formation and Microanalysis Cover Image
By P. W. Hawkes (Guest Editor), Ludwig Reimer
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Description


Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.


Product Details
ISBN: 9783540639763
ISBN-10: 3540639764
Publisher: Springer
Publication Date: September 17th, 1998
Pages: 529
Language: English
Series: Springer Series in Optical Sciences